LED ULTRAVIOLET EXPOSURE UNIT WITH ADJUSTABLE EXPOSURE TIME

LED ULTRAVIOLET EXPOSURE UNIT WITH ADJUSTABLE EXPOSURE TIME

The possibilities of improving the quality of the topological pattern in the exposure of thick-film photoresists due to uniform irradiation with ultraviolet light-emitting diodes are investigated. The results of an experimental study of the developed LED ultraviolet photolithographic irradiator with...

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Bibliographic Details
Main Authors: A. E. Cheliapin, P. S. Begunov, Y. V. Trofimov, G. K. Zhavnerko
Format: Article
Language:Russian
Published: Educational institution «Belarusian State University of Informatics and Radioelectronics» 2019-12-01
Series:Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki
Subjects:
uv leds
led irradiator
photolithography
thick-film photoresist
Online Access:https://doklady.bsuir.by/jour/article/view/2068

Internet

https://doklady.bsuir.by/jour/article/view/2068

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