CMOS Fabricated Large Array of Free Standing Substrate-Less Photonic Crystal Cavities for Biosensing Applications
In this paper, we present a methodology to postprocess a large array of a few hundred nanometer thin photonic membranes that were fabricated using complementary metal-oxide-semiconductor (CMOS) technological platform. The postprocessing results in local removal of the silicon substrate and of the bu...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2017-01-01
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| Series: | IEEE Photonics Journal |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/7885076/ |