A Micro Oxygen Sensor Based on a Nano Sol-Gel TiO2 Thin Film

A Micro Oxygen Sensor Based on a Nano Sol-Gel TiO2 Thin Film

An oxygen gas microsensor based on nanostructured sol-gel TiO2 thin films with a buried Pd layer was developed on a silicon substrate. The nanostructured titania thin films for O2 sensors were prepared by the sol-gel process and became anatase after heat treatment. A sandwich TiO2 square board with...

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Bibliographic Details
Main Authors: Hairong Wang, Lei Chen, Jiaxin Wang, Quantao Sun, Yulong Zhao
Format: Article
Language:English
Published: MDPI AG 2014-09-01
Series:Sensors
Subjects:
O2 sensors
sol-gel
nanostructured
MEMS (Micro-Electro-Mechanical System)
thin films
TiO2
Online Access:http://www.mdpi.com/1424-8220/14/9/16423

Internet

http://www.mdpi.com/1424-8220/14/9/16423

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