Growth of CrSi2 Nanostructures Using CrCl2 Powder on Si Substrates
<div>Chromium disilicide (CrSi2) nanostructures were grown by the exposure of Si (111) substrates to CrCl2 vapor in an argon gas flow at atmospheric pressure without using any metal catalyst. Dependence of the growth condition on the structural property was investigated. Hexagonal-shaped CrSi2...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Universitas Indonesia
2013-09-01
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| Series: | Makara Journal of Technology |
| Subjects: | |
| Online Access: | http://journal.ui.ac.id/technology/journal/article/view/257 |