Recent advances in nano-opto-electro-mechanical systems
Nano-opto-electro-mechanical systems (NOEMS), considered as new platforms to study electronic and mechanical freedoms in the field of nanophotonics, have gained rapid progress in recent years. NOEMS offer exciting opportunities to manipulate information carriers using optical, electrical, and mechan...
Main Authors: | , , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
De Gruyter
2021-06-01
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Series: | Nanophotonics |
Subjects: | |
Online Access: | https://doi.org/10.1515/nanoph-2021-0082 |