A Systematic Review of Deep Learning for Silicon Wafer Defect Recognition

A Systematic Review of Deep Learning for Silicon Wafer Defect Recognition

Advancements in technology have made deep learning a hot research area, and we see its applications in various fields. Its widespread use in silicon wafer defect recognition is replacing traditional machine learning and image processing methods of defect monitoring. This article presents a review of...

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Bibliographic Details
Main Authors: Uzma Batool, Mohd Ibrahim Shapiai, Muhammad Tahir, Zool Hilmi Ismail, Noor Jannah Zakaria, Ahmed Elfakharany
Format: Article
Language:English
Published: IEEE 2021-01-01
Series:IEEE Access
Subjects:
Wafer map defects
wafer bin map
defect recognition
deep learning
systematic literature review
Online Access:https://ieeexplore.ieee.org/document/9517097/

Internet

https://ieeexplore.ieee.org/document/9517097/

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