Mechanical Impedance Analysis of a Novel MEMS Photon Force Sensor
In this work we present how to describe mechanical impedance of a photon force (PF) MEMS sensor dedicated to structures’ optomechanical studies. An actuating force (photon force) is caused by the reflection and absorption of the electromagnetic radiation beam due to the radiation pressure effect. Sp...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2018-11-01
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| Series: | Proceedings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2504-3900/2/13/921 |