Preparation of aluminum doped zinc oxide targets and RF magnetron sputter thin films with various aluminum doping concentrations
In this work, aluminum doped zinc oxide (AZO) ceramic targets were prepared from ZnO powder and Al2O3 powder with varying amounts of Al2O3 doped in a range of 1-5 wt%. The mixed ZnO and Al2O3 powders were pressed at a pressure of 80 MPa into disks and sintered at 1,300 °C for 5 h in air. The cryst...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Prince of Songkla University
2018-08-01
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| Series: | Songklanakarin Journal of Science and Technology (SJST) |
| Subjects: | |
| Online Access: | https://rdo.psu.ac.th/sjstweb/journal/40-4/13.pdf |