Modeling of MOEMS electromagnetic scanning grating mirror for NIR micro-spectrometer
In this paper, the mathematical model is developed for researching the detailed electromagnetic mechanism of MOEMS scanning mirror. We present the relationship between spectral range and optical scanning angle. Furthermore, the variation tendencies of resonant frequency and maximal torsional angle a...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2016-02-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.4942973 |