Influence of the Surface Roughness of a Silicon Disk Resonator on Its Q-Factor

Influence of the Surface Roughness of a Silicon Disk Resonator on Its Q-Factor

This article presents a silicon disk resonator of the whispering-gallery-mode (WGM) type. The calculated Q-factor of the silicon WGM resonator was 10<sup>7</sup>. Two methods of studying the surface roughness of a silicon WGM resonator with a nonlinear profile by means of Helios 650 scan...

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Bibliographic Details
Main Authors: Anastasia V. Yakuhina, Alexey S. Kadochkin, Dmitry V. Gorelov, Vyacheslav V. Svetukhin, Sergey S. Generalov, Vladimir V. Amelichev
Format: Article
Language:English
Published: MDPI AG 2021-06-01
Series:Photonics
Subjects:
integrated optics
silicon technology
whispering gallery modes
photonics
ultrahigh-frequency resonator
Q-factor
Online Access:https://www.mdpi.com/2304-6732/8/6/225

Internet

https://www.mdpi.com/2304-6732/8/6/225

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