Condenser microphone with small size and high sensitivity Using a circular diaphragm with fixed center
In this paper, a new single-chip MEMS capacitor microphone on a silicon wafer by minimizing the size and the reduction of mechanical strength using a circular diaphragm with a fixed center is proposed. In the proposed microphone, the diaphragm includes a number of holes to pass the air through the g...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Najafabad Branch, Islamic Azad University
2016-01-01
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| Series: | Journal of Intelligent Procedures in Electrical Technology |
| Subjects: | |
| Online Access: | http://jipet.iaun.ac.ir/article_13383_801c57b7c43d4cfe14f6b421549f0a08.pdf |