An Electro-thermal MEMS Gripper with Large Tip Opening and Holding Force: Design and Characterization
This paper presents the design, fabrication, and characterization of a novel MEMS gripper that is driven electro-thermally by a new V-shape actuator (VSA) and a set of modified Guckel U-shape actuators (mUSA). The modification of the angle between the hot and cold arms in the mUSA facilitates unidir...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2011-12-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/december_2011/P_SI_165.pdf |