Two-beam laser purification of quartz raw material

The paper presents a numerical simulation of laser separation under the influence of laser beams with wavelengths  of  10.6  microns  and  1.06  microns  on  quartz  raw  material  used  in  the  electronics  industry in  the  manufacture  of  photomasks.  The  temperature  fields  obtained  by  the...

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Bibliographic Details
Main Authors: V. A. Emelyanov, E. B. Shershnev, S. I. Sokolov
Format: Article
Language:Russian
Published: Educational institution «Belarusian State University of Informatics and Radioelectronics» 2021-06-01
Series:Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki
Subjects:
Online Access:https://doklady.bsuir.by/jour/article/view/3076