Growth of Hexagonal Columnar Nanograin Structured SiC Thin Films on Silicon Substrates with Graphene–Graphitic Carbon Nanoflakes Templates from Solid Carbon Sources

Growth of Hexagonal Columnar Nanograin Structured SiC Thin Films on Silicon Substrates with Graphene–Graphitic Carbon Nanoflakes Templates from Solid Carbon Sources

We report a new method for growing hexagonal columnar nanograin structured silicon carbide (SiC) thin films on silicon substrates by using graphene–graphitic carbon nanoflakes (GGNs) templates from solid carbon sources. The growth was carried out in a conventional low pressure chemical vapor deposit...

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Bibliographic Details
Main Authors: Wanshun Zhao, Lei Wang, Lixin Tian, Shengbei Liu, Liu Zheng, Lin Dong, Yu Chen, Feng Zhang, Yang Zhang, Min Guan, Guoguo Yan, Bin Liu, Xingfang Liu, Guosheng Sun, Yiping Zeng
Format: Article
Language:English
Published: MDPI AG 2013-04-01
Series:Materials
Subjects:
hexagonal columnar
silicon carbide
thin film
graphene
nanoflake
solid carbon
CVD
Online Access:http://www.mdpi.com/1996-1944/6/4/1543

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http://www.mdpi.com/1996-1944/6/4/1543

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