Design and fabrication of low-loss antireflection structures for Si windows in 10–30 THz

We report on the design, fabrication, and characterization of low-loss antireflection (AR) structures for Si windows in 10–30 THz. Based on scattering-matrix simulations and effective medium theory, optimal Si filling ratios are presented for AR structures composed of Si-rod arrays and holey-Si film...

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Bibliographic Details
Main Authors: Huiting Chang, Liu Liu, Yanan Song, Chi Zhang, Xinhua Hu
Format: Article
Language:English
Published: AIP Publishing LLC 2018-05-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/1.5028553