High Precision Self-Mixing Interferometer Based on Reflective Phase Modulation Method
In this paper, a novel self-mixing interferometer based on reflective phase modulation (RPM) method has been developed to perform micro-displacement reconstruction with nanometer accuracy. Broaden harmonic components spectrum of the self-mixing signal is produced by employing a high-frequency vibrat...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2020-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9252891/ |