Temperature sensing performance and calibration of bi-material layer structure: role of material property variation
With the increasing demand of adopting advanced soft materials in MEMS and sensing applications, the material property variation of the soft materials with respect to the varying environmental conditions becomes an important factor to alter the device/sensor performance. In this study, a temperature...
Main Authors: | , |
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Format: | Article |
Language: | English |
Published: |
Elsevier
2020-11-01
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Series: | Forces in Mechanics |
Subjects: | |
Online Access: | http://www.sciencedirect.com/science/article/pii/S2666359720300019 |