Development of a capacitive chemical sensor based on Co(II)-phthalocyanine acrylate-polymer/HfO<sub>2</sub>/SiO<sub>2</sub>/Si for detection of perchlorate

Development of a capacitive chemical sensor based on Co(II)-phthalocyanine acrylate-polymer/HfO<sub>2</sub>/SiO<sub>2</sub>/Si for detection of perchlorate

We report the development of a chemical sensor based on a Co(II) phthalocyanine acrylate polymer (Co(II)Pc-AP) for perchlorate anion detection. We have used two types of transducers, silicon nitride (Si<sub>3</sub>N<sub>4</sub>) and hafnium oxide (HfO<sub>2</sub>)...

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Bibliographic Details
Main Authors: M. Braik, C. Dridi, M. Ben Ali, M. Ali, M. Abbas, M. Zabala, J. Bausells, N. Zine, N. Jaffrezic-Renault, A. Errachid
Format: Article
Language:English
Published: Copernicus Publications 2015-01-01
Series:Journal of Sensors and Sensor Systems
Online Access:http://www.j-sens-sens-syst.net/4/17/2015/jsss-4-17-2015.pdf

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http://www.j-sens-sens-syst.net/4/17/2015/jsss-4-17-2015.pdf

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