A nanoporous thin-film miniature interdigitated capacitive impedance sensor for measuring humidity
This paper presents a development of a low-cost miniature humidity sensor with an interdigitated aluminium electrode connected in parallel on quartz substrate. Interdigitated capacitive device has been fabricated using the photolithography method. The aluminium electrode was covered with sensitive f...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Taylor & Francis Group
2014-07-01
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| Series: | International Journal of Smart and Nano Materials |
| Subjects: | |
| Online Access: | http://dx.doi.org/10.1080/19475411.2014.935833 |