Direct growth of few-layer graphene on AlN-based resonators for high-sensitivity gravimetric biosensors
We present the successful growth of few-layer graphene on top of AlN-based solidly mounted resonators (SMR) using a low-temperature chemical vapour deposition (CVD) process assisted by Ni catalysts, and its effective bio-functionalization with antibodies. The SMRs are manufactured on top of fully in...
Main Authors: | , , , , , , |
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Format: | Article |
Language: | English |
Published: |
Beilstein-Institut
2019-04-01
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Series: | Beilstein Journal of Nanotechnology |
Subjects: | |
Online Access: | https://doi.org/10.3762/bjnano.10.98 |