Direct growth of few-layer graphene on AlN-based resonators for high-sensitivity gravimetric biosensors

We present the successful growth of few-layer graphene on top of AlN-based solidly mounted resonators (SMR) using a low-temperature chemical vapour deposition (CVD) process assisted by Ni catalysts, and its effective bio-functionalization with antibodies. The SMRs are manufactured on top of fully in...

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Bibliographic Details
Main Authors: Jimena Olivares, Teona Mirea, Lorena Gordillo-Dagallier, Bruno Marco, José Miguel Escolano, Marta Clement, Enrique Iborra
Format: Article
Language:English
Published: Beilstein-Institut 2019-04-01
Series:Beilstein Journal of Nanotechnology
Subjects:
Online Access:https://doi.org/10.3762/bjnano.10.98