Modeling the Crystallization of Amorphous Silicon Thin Films Using a High Repetition Rate Scanning Laser
An optimum design of experimental setup for the preparation of polycrystalline silicon (pc-Si) films from amorphous layers applicable in the solar cell production is analyzed in the paper. In the computational simulations, the influence of basic characteristic parameters of the experimental proc...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
CTU Central Library
2000-01-01
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| Series: | Acta Polytechnica |
| Online Access: | https://ojs.cvut.cz/ojs/index.php/ap/article/view/38 |