Preparation and thermal volatility characteristics of In2O3/ITO thin film thermocouple by RF magnetron sputtering
In2O3/ITO thin film thermocouples for high temperature measurement (up to 1250 °C) were prepared by radio frequency magnetron sputtering method with different annealing temperatures from 1100 °C to 1250 °C. The changes with microstructure characteristics and the thickness of the thin film thermocoup...
| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2017-11-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.4999246 |