MEMS Gyroscopes Based on Acoustic Sagnac Effect

MEMS Gyroscopes Based on Acoustic Sagnac Effect

This paper reports on the design, fabrication and preliminary test results of a novel microelectromechanical systems (MEMS) device—the acoustic gyroscope. The unique operating mechanism is based on the “acoustic version” of the Sagnac effect in fiber-optic gyros. The device measures the phase differ...

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Bibliographic Details
Main Authors: Yuanyuan Yu, Hao Luo, Buyun Chen, Jin Tao, Zhihong Feng, Hao Zhang, Wenlan Guo, Daihua Zhang
Format: Article
Language:English
Published: MDPI AG 2016-12-01
Series:Micromachines
Subjects:
acoustic gyroscope
Sagnac effect
phase difference
sound waves
angular velocity
sensitivity
Online Access:http://www.mdpi.com/2072-666X/8/1/2

Internet

http://www.mdpi.com/2072-666X/8/1/2

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