Shallow Levels Characterization in Epitaxial GaAs by Acousto-Optic Reflectance Shallow Levels Characterization in Epitaxial GaAs by Acousto-Optic Reflectance
Optical spectra of light reflection are detected under an influence of ultrasonic wave (UW)on a GaAs wafer. The differential spectrum is calculated as a difference between those taken under UW and without that influence on a sample. This acousto-optic differential reflectance(AODR) spectrum contains...
Main Authors: | , , , , , , , , , , , , , , |
---|---|
Format: | Article |
Language: | Spanish |
Published: |
Universidad de Guanajuato
2012-02-01
|
Series: | Acta Universitaria |
Subjects: | |
Online Access: | http://www.actauniversitaria.ugto.mx/index.php/acta/article/view/211 |