SOME RELIABILITY ASPECTS OF MEMS AND NEMS MANUFACTURING
A full understanding of the physics and statistics of the defect generation is required to investigate the ultimate reliability limitations of manufacturability of MEMS and NEMS. In order that the user can include electronic components in circuits to achieve error- free and reliable functional units...
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| Format: | Article |
| Language: | English |
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Technical University of Moldova
2021-06-01
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| Series: | Journal of Engineering Science (Chişinău) |
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| Online Access: | https://jes.utm.md/wp-content/uploads/sites/20/2021/06/JES-2-2021_91-102.pdf |