Morphological features in aluminum nitride epilayers prepared by magnetron sputtering

Morphological features in aluminum nitride epilayers prepared by magnetron sputtering

The aim of this study is to characterize the surface topography of aluminum nitride (AlN) epilayers prepared by magnetron sputtering using the surface statistical parameters, according to ISO 25178-2:2012. To understand the effect of temperature on the epilayer structure, the surface topography was...

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Bibliographic Details
Main Authors: Stach Sebastian, Dallaeva Dinara, Ţălu Ştefan, Kaspar Pavel, Tománek Pavel, Giovanzana Stefano, Grmela Lubomír
Format: Article
Language:English
Published: Sciendo 2015-03-01
Series:Materials Science-Poland
Subjects:
aluminum nitride epilayer
atomic force microscopy
magnetron sputtering
substrate
surface roughness
Online Access:https://doi.org/10.1515/msp-2015-0036

Internet

https://doi.org/10.1515/msp-2015-0036

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