Coupling and Shielding Properties of the Baffle in ICP System

This contribution is dealing with experimental and computational evaluation of the deposition baffle that is transparent to radio frequency (RF) magnetic fields generated by an external antenna in an inductively coupled plasma (ICP) source but opaque to the deposition of the metal onto a dielectric...

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Bibliographic Details
Main Authors: Jozef Brcka, R. Lee Robison
Format: Article
Language:English
Published: Hindawi Limited 2011-01-01
Series:Modelling and Simulation in Engineering
Online Access:http://dx.doi.org/10.1155/2011/541743

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