The influence of cathode excavation of cathodic arc evaporator on thickness uniformity and erosion products angle distribution
<p>Cathodic arc evaporators are used for coating with functional films. Prolonged or buttend evaporators may be used for this purposes. In butt-end evaporator the cathode spots move continuously on the cathode work surface and evaporate cathode material. High depth excavation profile forms on...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | Russian |
| Published: |
MGTU im. N.È. Baumana
2014-01-01
|
| Series: | Nauka i Obrazovanie |
| Subjects: | |
| Online Access: | http://technomag.edu.ru/jour/article/view/564 |