MECHANISMS OF MULTI-FUNCTIONAL LAYER COATINGS BASED ON SILICON CARBIDE
The paper investigates regularities pertaining to structure formation in a thin-film coating applied on diamond crystals by magnetron dispersion of a combined cathode (Si + C). It has been established that an amorphous layer of Si and C atom mixture is formed in the condensation process of a thin-...
| Main Authors: | , |
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| Format: | Article |
| Language: | Russian |
| Published: |
Belarusian National Technical University
2010-12-01
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| Series: | Nauka i Tehnika |
| Online Access: | https://sat.bntu.by/jour/article/view/559 |