2D MEMS scanner integrating a position feedback
An integrated position sensor for a dual-axis electromagnetic tilting mirror is presented. This tilting mirror is composed of a silicon based mirror directly assembled on a silicon membrane supported by flexible beams. The position sensors are constituted by 4 Wheatstone bridges of piezoresistors wh...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2015-01-01
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| Series: | MATEC Web of Conferences |
| Online Access: | http://dx.doi.org/10.1051/matecconf/20153201001 |