Analysis of Si3N4 waveguides for on-chip gas sensing by optical absorption within the mid-infrared region between 2.7 and 3.4 µm
We theoretically investigated the use of a Si3N4 on SiO2 waveguide as an optical interaction part with sensed molecules for multi-gas wideband on-chip spectroscopic sensing. From the analysis, we show that a simple strip Si3N4 waveguide can be employed to achieve acceptable values of performance in...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2020-03-01
|
| Series: | Results in Physics |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S221137971933606X |
| id |
doaj-4343113c5ed34ae9bccf42d9fa0cf9ec |
|---|---|
| record_format |
Article |
| spelling |
doaj-4343113c5ed34ae9bccf42d9fa0cf9ec2020-11-25T03:41:05ZengElsevierResults in Physics2211-37972020-03-0116102957Analysis of Si3N4 waveguides for on-chip gas sensing by optical absorption within the mid-infrared region between 2.7 and 3.4 µmNatnicha Koompai0Pichet Limsuwan1Xavier Le Roux2Laurent Vivien3Delphine Marris-Morini4Papichaya Chaisakul5Department of Physics, Faculty of Science, Kasetsart University, Bangkok 10900, ThailandDepartment of Physics, Faculty of Science, King Mongkut’s University of Technology Thonburi, Bangkok 10140, ThailandCentre de Nanosciences et de Nanotechnologies, Université Paris Sud, CNRS, Université Paris Saclay, 91405 Orsay, FranceCentre de Nanosciences et de Nanotechnologies, Université Paris Sud, CNRS, Université Paris Saclay, 91405 Orsay, FranceCentre de Nanosciences et de Nanotechnologies, Université Paris Sud, CNRS, Université Paris Saclay, 91405 Orsay, FranceDepartment of Physics, Faculty of Science, Kasetsart University, Bangkok 10900, Thailand; Corresponding author.We theoretically investigated the use of a Si3N4 on SiO2 waveguide as an optical interaction part with sensed molecules for multi-gas wideband on-chip spectroscopic sensing. From the analysis, we show that a simple strip Si3N4 waveguide can be employed to achieve acceptable values of performance in term of detection limit, compactness, polarization, and fabrication tolerance for the detection of water vapor (H2O), carbon dioxide (CO2), Nitrous oxide (N2O), Ammonia (NH3), Ethylene (C2H4), and Methane (CH4) gas molecules, with a wideband operation between 2.7 and 3.4 µm optical wavelength. The results show that a simple Si3N4 waveguide structure could attain competitive performance required for generic on-chip spectroscopic sensing for environmental and agricultural usage.http://www.sciencedirect.com/science/article/pii/S221137971933606X |
| collection |
DOAJ |
| language |
English |
| format |
Article |
| sources |
DOAJ |
| author |
Natnicha Koompai Pichet Limsuwan Xavier Le Roux Laurent Vivien Delphine Marris-Morini Papichaya Chaisakul |
| spellingShingle |
Natnicha Koompai Pichet Limsuwan Xavier Le Roux Laurent Vivien Delphine Marris-Morini Papichaya Chaisakul Analysis of Si3N4 waveguides for on-chip gas sensing by optical absorption within the mid-infrared region between 2.7 and 3.4 µm Results in Physics |
| author_facet |
Natnicha Koompai Pichet Limsuwan Xavier Le Roux Laurent Vivien Delphine Marris-Morini Papichaya Chaisakul |
| author_sort |
Natnicha Koompai |
| title |
Analysis of Si3N4 waveguides for on-chip gas sensing by optical absorption within the mid-infrared region between 2.7 and 3.4 µm |
| title_short |
Analysis of Si3N4 waveguides for on-chip gas sensing by optical absorption within the mid-infrared region between 2.7 and 3.4 µm |
| title_full |
Analysis of Si3N4 waveguides for on-chip gas sensing by optical absorption within the mid-infrared region between 2.7 and 3.4 µm |
| title_fullStr |
Analysis of Si3N4 waveguides for on-chip gas sensing by optical absorption within the mid-infrared region between 2.7 and 3.4 µm |
| title_full_unstemmed |
Analysis of Si3N4 waveguides for on-chip gas sensing by optical absorption within the mid-infrared region between 2.7 and 3.4 µm |
| title_sort |
analysis of si3n4 waveguides for on-chip gas sensing by optical absorption within the mid-infrared region between 2.7 and 3.4 µm |
| publisher |
Elsevier |
| series |
Results in Physics |
| issn |
2211-3797 |
| publishDate |
2020-03-01 |
| description |
We theoretically investigated the use of a Si3N4 on SiO2 waveguide as an optical interaction part with sensed molecules for multi-gas wideband on-chip spectroscopic sensing. From the analysis, we show that a simple strip Si3N4 waveguide can be employed to achieve acceptable values of performance in term of detection limit, compactness, polarization, and fabrication tolerance for the detection of water vapor (H2O), carbon dioxide (CO2), Nitrous oxide (N2O), Ammonia (NH3), Ethylene (C2H4), and Methane (CH4) gas molecules, with a wideband operation between 2.7 and 3.4 µm optical wavelength. The results show that a simple Si3N4 waveguide structure could attain competitive performance required for generic on-chip spectroscopic sensing for environmental and agricultural usage. |
| url |
http://www.sciencedirect.com/science/article/pii/S221137971933606X |
| work_keys_str_mv |
AT natnichakoompai analysisofsi3n4waveguidesforonchipgassensingbyopticalabsorptionwithinthemidinfraredregionbetween27and34μm AT pichetlimsuwan analysisofsi3n4waveguidesforonchipgassensingbyopticalabsorptionwithinthemidinfraredregionbetween27and34μm AT xavierleroux analysisofsi3n4waveguidesforonchipgassensingbyopticalabsorptionwithinthemidinfraredregionbetween27and34μm AT laurentvivien analysisofsi3n4waveguidesforonchipgassensingbyopticalabsorptionwithinthemidinfraredregionbetween27and34μm AT delphinemarrismorini analysisofsi3n4waveguidesforonchipgassensingbyopticalabsorptionwithinthemidinfraredregionbetween27and34μm AT papichayachaisakul analysisofsi3n4waveguidesforonchipgassensingbyopticalabsorptionwithinthemidinfraredregionbetween27and34μm |
| _version_ |
1724531800488804352 |