Analysis of Si3N4 waveguides for on-chip gas sensing by optical absorption within the mid-infrared region between 2.7 and 3.4 µm
We theoretically investigated the use of a Si3N4 on SiO2 waveguide as an optical interaction part with sensed molecules for multi-gas wideband on-chip spectroscopic sensing. From the analysis, we show that a simple strip Si3N4 waveguide can be employed to achieve acceptable values of performance in...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2020-03-01
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| Series: | Results in Physics |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S221137971933606X |