Delayed Discharge Bridging Two Sputtering Modes from Modulated Pulsed Power Magnetron Sputtering (MPPMS) to Deep Oscillation Magnetron Sputtering (DOMS)

Delayed Discharge Bridging Two Sputtering Modes from Modulated Pulsed Power Magnetron Sputtering (MPPMS) to Deep Oscillation Magnetron Sputtering (DOMS)

Delayed discharges due to electrical breakdown are observed in modulated pulsed pow er magnetron sputtering (MPPMS) plasma of titanium. The delayed discharge, which is remarkable with decreasing argon gas pressure, transforms the discharge current waveform from a standard modulated pulsed discharge...

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Bibliographic Details
Main Authors: Masaomi Sanekata, Hiroshi Nishida, Tatsuya Watabe, Yuki Nakagomi, Yoshihiro Hirai, Nobuo Nishimiya, Masahide Tona, Hiroaki Yamamoto, Naoyuki Hirata, Keizo Tsukamoto, Keijiro Ohshimo, Fuminori Misaizu, Kiyokazu Fuke
Format: Article
Language:English
Published: MDPI AG 2021-04-01
Series:Plasma
Subjects:
magnetron sputtering
HPPMS
MPPMS
DOMS
delayed discharge
electrical breakdown
Online Access:https://www.mdpi.com/2571-6182/4/2/16

Internet

https://www.mdpi.com/2571-6182/4/2/16

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