Research status in ultra-precision machining of silicon carbide parts by oxidation-assisted polishing

Research status in ultra-precision machining of silicon carbide parts by oxidation-assisted polishing

Oxidation-assisted polishing is an important machining method for obtaining SiC parts with high precision. Through plasma oxidation, thermal oxidation, and anodic oxidation, soft oxide can be obtained on the RS-SiC substrate. With the assistance of abrasive polishing to remove the oxide rapidly, the...

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Bibliographic Details
Main Authors: Xinmin SHEN, Qunzhang TU, Xiaonan ZHANG, Qin YIN, Dong WANG
Format: Article
Language:zho
Published: Hebei University of Science and Technology 2016-10-01
Series:Journal of Hebei University of Science and Technology
Subjects:
non-traditional machining
RS-SiC
oxidation-assisted polishing
surface roughness
material removal rate
Online Access:http://xuebao.hebust.edu.cn/hbkjdx/ch/reader/create_pdf.aspx?file_no=b201605002&flag=1&journal_

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