Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range

Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range

We demonstrate single-order operation of Lamellar Multilayer Gratings in the soft x-ray spectral range. The spectral resolution was found to be 3.8 times higher than from an unpatterned multilayer mirror, while there were no significant spectral sideband structures adjacent to the main Bragg peak. T...

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Main Authors: Robert van der Meer, Igor Kozhevnikov, Balachander Krishnan, Jurriaan Huskens, Petra Hegeman, Christian Brons, Boris Vratzov, Bert Bastiaens, Klaus Boller, Fred Bijkerk
Format: Article
Language:English
Published: AIP Publishing LLC 2013-01-01
Series:AIP Advances
Online Access:http://link.aip.org/link/doi/10.1063/1.4774297
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spelling doaj-411d43f00e8f43e8a206704d584b38032020-11-24T21:56:15ZengAIP Publishing LLCAIP Advances2158-32262013-01-013101210301210310.1063/1.4774297Single-order operation of lamellar multilayer gratings in the soft x-ray spectral rangeRobert van der MeerIgor KozhevnikovBalachander KrishnanJurriaan HuskensPetra HegemanChristian BronsBoris VratzovBert BastiaensKlaus BollerFred BijkerkWe demonstrate single-order operation of Lamellar Multilayer Gratings in the soft x-ray spectral range. The spectral resolution was found to be 3.8 times higher than from an unpatterned multilayer mirror, while there were no significant spectral sideband structures adjacent to the main Bragg peak. The measured spectral bandwidths and peak reflectivities were in good agreement with our theoretical calculations. http://link.aip.org/link/doi/10.1063/1.4774297
collection DOAJ
language English
format Article
sources DOAJ
author Robert van der Meer
Igor Kozhevnikov
Balachander Krishnan
Jurriaan Huskens
Petra Hegeman
Christian Brons
Boris Vratzov
Bert Bastiaens
Klaus Boller
Fred Bijkerk
spellingShingle Robert van der Meer
Igor Kozhevnikov
Balachander Krishnan
Jurriaan Huskens
Petra Hegeman
Christian Brons
Boris Vratzov
Bert Bastiaens
Klaus Boller
Fred Bijkerk
Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range
AIP Advances
author_facet Robert van der Meer
Igor Kozhevnikov
Balachander Krishnan
Jurriaan Huskens
Petra Hegeman
Christian Brons
Boris Vratzov
Bert Bastiaens
Klaus Boller
Fred Bijkerk
author_sort Robert van der Meer
title Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range
title_short Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range
title_full Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range
title_fullStr Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range
title_full_unstemmed Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range
title_sort single-order operation of lamellar multilayer gratings in the soft x-ray spectral range
publisher AIP Publishing LLC
series AIP Advances
issn 2158-3226
publishDate 2013-01-01
description We demonstrate single-order operation of Lamellar Multilayer Gratings in the soft x-ray spectral range. The spectral resolution was found to be 3.8 times higher than from an unpatterned multilayer mirror, while there were no significant spectral sideband structures adjacent to the main Bragg peak. The measured spectral bandwidths and peak reflectivities were in good agreement with our theoretical calculations.
url http://link.aip.org/link/doi/10.1063/1.4774297
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