Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range
We demonstrate single-order operation of Lamellar Multilayer Gratings in the soft x-ray spectral range. The spectral resolution was found to be 3.8 times higher than from an unpatterned multilayer mirror, while there were no significant spectral sideband structures adjacent to the main Bragg peak. T...
Main Authors: | , , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
AIP Publishing LLC
2013-01-01
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Series: | AIP Advances |
Online Access: | http://link.aip.org/link/doi/10.1063/1.4774297 |