Development of numerically controlled local wet etching
Numerically controlled local wet etching (NC-LWE) has been developed as a novel noncontact subaperture deterministic figuring method for fabricating ultraprecision optics or for finishing functional materials. In this method, a localized wet etching area is formed using a combined nozzle that is con...
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| Format: | Article |
| Language: | English |
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Taylor & Francis Group
2007-01-01
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| Series: | Science and Technology of Advanced Materials |
| Online Access: | http://www.iop.org/EJ/abstract/1468-6996/8/3/A06 |