Solving of the Boltzmann transport equation using two - term approximation for pure electronegative gases (SF6, CCl2F2)
The Boltzmann transport equation is solved by using two-term approximation for pure electronegative gases (SF6, CCl2F2). This method used to calculate the electron energy distribution function (EEDF) and electron swarm parameters in the range of E/N varying from 100 Td to 1000 Td (1 Td=10-17 V.cm2)....
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Salahaddin University-Erbil
2019-10-01
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| Series: | Zanco Journal of Pure and Applied Sciences |
| Subjects: | |
| Online Access: | https://zancojournals.su.edu.krd/index.php/JPAS/article/view/3232 |