Hierarchical patterning by multi-step micro-imprinting with layered materials
The objective of the work reported in this paper is to create multi-scale and hierarchical surface structures using a simple imprinting process. The hierarchical structures can be fabricated with only simple patterned molds by proposed multi-step imprinting process, instead of using a high cost hier...
Main Authors: | Tsumori Fujio, Shen Lijan, Osada Toshiko, Miura Hideshi |
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Format: | Article |
Language: | English |
Published: |
EDP Sciences
2015-01-01
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Series: | Manufacturing Review |
Subjects: | |
Online Access: | http://dx.doi.org/10.1051/mfreview/2015008 |
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