Hierarchical patterning by multi-step micro-imprinting with layered materials

The objective of the work reported in this paper is to create multi-scale and hierarchical surface structures using a simple imprinting process. The hierarchical structures can be fabricated with only simple patterned molds by proposed multi-step imprinting process, instead of using a high cost hier...

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Bibliographic Details
Main Authors: Tsumori Fujio, Shen Lijan, Osada Toshiko, Miura Hideshi
Format: Article
Language:English
Published: EDP Sciences 2015-01-01
Series:Manufacturing Review
Subjects:
Online Access:http://dx.doi.org/10.1051/mfreview/2015008