Structural Characteristics and Photoluminescence Properties of Sputter-Deposition ZnGa<sub>2</sub>O<sub>4</sub> Thin Films on Sapphire and Si(100) Substrates
In this paper, we report the growth and material characteristics of ZnGa<sub>2</sub>O<sub>4</sub> thin films on <i>c</i>-plane sapphire and Si(100) substrates by a radio-frequency magnetron sputtering. When deposited on sapphire, the ZnGa<sub>2</sub>O&...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-07-01
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| Series: | Coatings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2079-6412/9/8/469 |