Microstructure Changes of Ti-Al-C Films Deposited by Filtered Cathodic Vacuum Arc
Nanocomposite Ti-Al-C films were deposited by filtered cathodic vacuum arc (FCVA) at different CH4 flows. The deposited films were characterized in terms of elemental and phase compositions, chemical bonds, and texture as a function of CH4 flow rate by XRD, XPS, HRTEM, Raman spectroscopy, and IR spe...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Hindawi Limited
2014-01-01
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| Series: | Journal of Nanomaterials |
| Online Access: | http://dx.doi.org/10.1155/2014/286484 |