COMPLEX FOR ELEMENTAL ANALYSIS OF SUBSURFACE LAYERS WITH NANOMETER DEPTH RESOLUTION
A measuring complex for quantitative analysis of element contents and distributions of doping atoms in subsurface layers of crystals as well as in thin films by means of the registration of energy spectra of ions scattered to angles higher than π/2 has been designed and fabricated. The complex const...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Belarusian National Technical University
2015-04-01
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| Series: | Pribory i Metody Izmerenij |
| Online Access: | https://pimi.bntu.by/jour/article/view/177 |