Development of a Compound Speckle Interferometer for Precision Three-Degree-of-Freedom Displacement Measurement
In this study, a compound speckle interferometer for measuring three-degree-of-freedom (3-DOF) displacement is proposed. The system, which combines heterodyne interferometry, speckle interferometry and beam splitting techniques, can perform precision 3-DOF displacement measurements, while still havi...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-03-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/21/5/1828 |