Design Issues for Low Power Integrated Thermal Flow Sensors with Ultra-Wide Dynamic Range and Low Insertion Loss

Design Issues for Low Power Integrated Thermal Flow Sensors with Ultra-Wide Dynamic Range and Low Insertion Loss

Flow sensors are the key elements in most systems for monitoring and controlling fluid flows. With the introduction of MEMS thermal flow sensors, unprecedented performances, such as ultra wide measurement ranges, low power consumptions and extreme miniaturization, have been achieved, although severa...

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Bibliographic Details
Main Authors: Paolo Bruschi, Massimo Piotto
Format: Article
Language:English
Published: MDPI AG 2012-04-01
Series:Micromachines
Subjects:
thermal flow sensors
device optimization
MEMS
multi heater
sensitivity
resolution
Online Access:http://www.mdpi.com/2072-666X/3/2/295/

Internet

http://www.mdpi.com/2072-666X/3/2/295/

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