STUDY OF BIREFRINGENCE INFLUENCE ON IMAGE QUALITY OF PHOTOLITHOGRAPHY SYSTEMS IN VIEW OF PARTIALLY-COHERENT LIGHT SOURCE
Subject of study. A vector model for conversion of electromagnetic radiation in optical systems is considered, taking into account the influence of birefringence, as well as partially coherent illumination. Model. The proposed model is based on the representation of the complex amplitude of the mon...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Saint Petersburg National Research University of Information Technologies, Mechanics and Optics (ITMO University)
2015-03-01
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| Series: | Naučno-tehničeskij Vestnik Informacionnyh Tehnologij, Mehaniki i Optiki |
| Subjects: | |
| Online Access: | http://ntv.ifmo.ru/file/article/12840.pdf |