The Film Thickness Effect on Electrical Conduction Mechanisms and Characteristics of the Ni–Cr Thin Film Resistor

The electrical conduction mechanisms of Ni-Cr thin film resistor are demonstrated by different film thickness through scattering models fitting. The resistivity and temperature coefficient of the resistance of Ni-Cr thin film are measured to investigate the influence of thickness with different anne...

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Bibliographic Details
Main Authors: Nai-Chuan Chuang, Jyi-Tsong Lin, Ting-Chang Chang, Tsung-Ming Tsai, Kuan-Chang Chang, Chih-Wei Wu
Format: Article
Language:English
Published: IEEE 2016-01-01
Series:IEEE Journal of the Electron Devices Society
Subjects:
Online Access:https://ieeexplore.ieee.org/document/7543500/