Synthesis of nanocrystalline silicon thin films using the increase of the deposition pressure in the hot-wire chemical vapour deposition technique
Nanostructured thin silicon-based films have been deposited using the hot-wire chemical vapour deposition (HWCVD) technique at the University of the Western Cape. A variety of techniques including optical and infrared spectroscopy, Raman scattering spectroscopy, X-rays diffraction (XRD) and transmis...
Main Authors: | , , , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
Academy of Science of South Africa
2010-01-01
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Series: | South African Journal of Science |
Online Access: | http://archive.sajs.co.za/index.php/SAJS/article/view/79 |