Some Ultimate Limits on the Measurement of Surfaces Using Stylus Techniques
In recent years the use of stylus instruments has progressed from mainly engineering applications into research fields. This is mainly due to the development of highly sensitive instruments. Some results of this work are shown together with the limits of measurement encountered on the surface layer,...
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| Format: | Article |
| Language: | English |
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SAGE Publishing
1975-04-01
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| Series: | Measurement + Control |
| Online Access: | https://doi.org/10.1177/002029407500800407 |