Torsional Moving Electric Field Sensor with Modulated Sensitivity and without Reference Ground
A MEMS electric field sensor is presented with wide measurement resolution and adjustable sensitivity. The sense membrane is mounted using torsional springs and employs opposite biased electrodes on its surface, causing rotation in presence of an electric field, enabling operation without reference...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2017-08-01
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| Series: | Proceedings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2504-3900/1/4/350 |